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Levitation in vacuum has evolved into a versatile technique which has alreadybenefited diverse scientific directions, from force sensing and thermodynamicsto material science and chemistry. It also holds great promises of advancingthe study of quantum mechanics in the unexplored macroscopic regime. While mostcurrent levitation platforms are complex and bulky, miniaturization is soughtto gain robustness and facilitate their integration into confined settings,such as cryostats or portable devices. Integration on chip is also anticipatedto enhance the control over the particle motion through a more preciseengineering of optical and electric fields. As a substantial milestone towardsthis goal, we present here levitation and motion control in high vacuum of asilica nanoparticle at the surface of a hybrid optical-electrostatic chip. Bycombining fiber-based optical trapping and sensitive position detection withcold damping through planar electrodes, we cool the particle motion to a fewhundred phonons. Our results pave the way to the next generation of integratedlevitation platforms combining integrated photonics and nanophotonics withengineered electric potentials, towards complex state preparation and read out.

Vacuum levitation and motion control on chip