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This paper reports the first high-performance acoustic filters towardmillimeter wave (mmWave) bands using transferred single-crystal thin filmlithium niobate (LiNbO3). By transferring LiNbO3 on the top of silicon (Si) andsapphire (Al2O3) substrates with an intermediate amorphous Si (aSi) bonding andsacrificial layer, we demonstrate compact acoustic filters with record-breakingperformance beyond 20 GHz. In the LN-aSi-Al2O3 platform, the third-order ladderfilter exhibits low insertion loss (IL) of 1.62 dB and 3-dB fractionalbandwidth (FBW) of 19.8% at 22.1 GHz, while in the LN-aSi-Si platform, thefilter shows low IL of 2.38 dB and FBW of 18.2% at 23.5 GHz. Material analysisvalidates the great crystalline quality of the stacks. The high-resolutionx-ray diffraction (HRXRD) shows full width half maximum (FWHM) of 53 arcsec forAl2O3 and 206 arcsec for Si, both remarkably low compared to piezoelectric thinfilms of similar thickness. The reported results bring the state-of-the-art(SoA) of compact acoustic filters to much higher frequencies, and highlighttransferred LiNbO3 as promising platforms for mmWave filters in future wirelessfront ends.

Transferred Thin Film Lithium Niobate as Millimeter Wave Acoustic Filter Platforms