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Non-destructive cross-sectional characterization of materials systems with aresolution in the nanometer range and the ability to allow for time-resolvedin-situ studies is of great importance in material science. Here, we presentsuch a measurements method, extreme ultraviolet coherence tomography (XCT). Themethod is non-destructive during sample preparation as well as during themeasurement, which is distinguished by a negligible thermal load as compared toelectron microscopy methods. Laser-generated radiation in the extremeultraviolet (XUV) and soft x-ray range is used for characterization. Themeasurement principle is interferometric and the signal evaluation is performedvia an iterative Fourier analysis. The method is demonstrated on the metallicmaterial system Al-Al$_2$Cu and compared to electron and atomic forcemicroscopy measurements. We also present advanced reconstruction methods forXCT which even allow for the determination of the roughness of outer and innerinterfaces.

Non-destructive depth reconstruction of Al-Al$_2$Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography