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We perform Low Energy Ion Scattering with 1\,keV He ions on CaSiO$_3$ using acommercial electrostatic detector system and determine the charge fraction ofscattered ions from comparison with Binary Collision Approximation simulations.The simulations take dynamical surface changes due to surface cleaning Arsputtering into account and scattered He particles are separated into single,dual, and multiple scattering trajectories. We find that the charge fraction ofsingle and dual scattered He is about 10 times higher than the one for multiplecollisions. Our results show that quantitative concentration profiles can beinferred from this method, if the charge fraction components are determinedfirst.

Towards quantitative Low Energy Ion Scattering on CaSiO$_3$ from  Comparison to Multiple-Scattering-Resolved Dynamical Binary Collision  Approximation Simulations