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The rise of the 4H-silicon-carbide-on-insulator (SiCOI) platform marks apromising pathway towards the realization of monolithic quantum photonicnetworks. However, the challenge of establishing room-temperature entangledregisters on these integrated photonics platforms remains unresolved. Herein,we demonstrate the first entangled processor on the SiCOI platform. We showthat both deterministic generation of single divacancy electron spins andnear-unity spin initialization of a single $^{13}$C nuclear spin can beachieved on SiCOI at room temperature. Besides coherently manipulating thesingle nuclear spin, a maximally entangled state with a fidelity of 0.89 hasbeen prepared on this CMOS-compatible semiconductor-integrated photonicssystem. This work establishes the foundation for compact and on-chip solutionswithin existing defect-based computing and sensing protocols, positioning theSiCOI platform as the most promising candidate for integrated monolithicquantum photonic networks.

Room-Temperature entangled quantum processor on integrated semiconductor photonics platform