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We have investigated the impact of thermal annealing on the interaction ofsingle layer MoS2 and Au using Raman Spectroscopy. We found MoS2 has two mainmodes of interactions with the underlying Au being either weakly-coupled orstrongly-coupled. The regions strongly-coupled to Au are hybridized to Au,minimally strained, and electron-doped. The weakly-coupled regions are found tobe slightly hole-doped with tensile strain of 1.0 %. The observed nanoscaleinhomogeneities in doping would result in Au contacts having a largevariability in performance. The overall areal coverage of the strongly-coupledregions is not increased by thermal annealing, and the variability in thedegree of hybridization increases at annealing temperatures above 100 {\deg}C.Our data also show that monolayer MoS2 starts to decouple from Au around 100{\deg}C, becoming fully decoupled above 250 {\deg}C, suggesting that monolayerMoS2 produced by Au-assisted mechanical exfoliation may be more easilytransferred off Au at elevated temperatures.

Impact of thermal annealing on the interaction between monolayer MoS2 and Au