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Quantum computers are nearing the thousand qubit mark, with the current focuson scaling to improve computational performance. As quantum processors grow incomplexity, new challenges arise such as the management of device variabilityand the interface with supporting electronics. Spin qubits in silicon quantumdots are poised to address these challenges with their proven controlfidelities and potential for compatibility with large-scale integration. Here,we demonstrate the integration of 1024 silicon quantum dots with on-chipdigital and analogue electronics, all operating below 1 K. A high-frequencyanalogue multiplexer provides fast access to all devices with minimalelectrical connections, enabling characteristic data across the quantum dotarray to be acquired in just 5 minutes. We achieve this by leveragingradio-frequency reflectometry with state-of-the-art signal integrity, reachinga minimum integration time of 160 ps. Key quantum dot parameters are extractedby fast automated machine learning routines to assess quantum dot yield andunderstand the impact of device design. We find correlations between quantumdot parameters and room temperature transistor behaviour that may be used as aproxy for in-line process monitoring. Our results show how rapid large-scalestudies of silicon quantum devices can be performed at lower temperatures andmeasurement rates orders of magnitude faster than current probing techniques,and form a platform for the future on-chip addressing of large scale qubitarrays.

Rapid cryogenic characterisation of 1024 integrated silicon quantum dots