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In this paper, the electrical characteristics of the Gaseous ElectronicsConference (GEC) reference cell with impedance matching are investigatedthrough a two-dimensional electrostatic implicit Particle-in-Cell/Monte CarloCollision (PIC/MCC) model in an axisymmetric coordinate system. The couplingbetween the complex reactor geometry and the external circuit is included viaan equivalent capacitance calculated from the electric energy density. Theresults of this model are compared with experimental measurements and othermodel calculations and show good agreement. This simulation obtains the plasmakinetics of the capacitively coupled discharge process at low pressure anddetailed external circuit responses, including power transmission, reflection,and higher-order harmonics in the circuit, which provides important insightsfor impedance-matching design in semiconductor plasma processing.

Electrical Characteristics of the GEC Reference Cell with Impedance Matching: A Two-Dimensional PIC/MCC Modeling Study