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Light-concentrating truncated Si micropyramidal arrays with 54.7 degreesidewall angles were successfully integrated with PtSi Schottky barrierphotodetectors. Four different devices consisting of 10 x 10 photodetectorswith 60 um pitch combined in parallel were tested, where significantenhancement capability was demonstrated by the Si micropyramids. The deviceconsisting of one hundred 22 um square detectors monolithically integrated withthe light-concentrating micropyramidal array displayed signal enhancement of upto 4 times compared to the same size 22 um square photodetector device withoutthe light concentrators.

Photodetector Focal Plane Arrays Integrated with Silicon Micropyramidal Structures in MWIR