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Cavity-enhanced single quantum dots (QDs) are the main approach towardsultra-high-performance solid-state quantum light sources for scalable photonicquantum technologies. Nevertheless, harnessing the Purcell effect requiresprecise spectral and spatial alignment of the QDs' emission with the cavitymode, which is challenging for most cavities. Here we have successfullyintegrated miniaturized Fabry-Perot microcavities with a piezoelectricactuator, and demonstrated a bright single photon source derived from adeterministically coupled QD within this microcavity. Leveraging thecavity-membrane structures, we have achieved large spectral-tunability viastrain tuning. On resonance, we have obtained a high Purcell factor ofapproximately 9. The source delivers single photons with simultaneous highextraction efficiency of 0.58, high purity of 0.956(2) and highindistinguishability of 0.922(4). Together with a small footprint, our schemefacilitates the scalable integration of indistinguishable quantum light sourceson-chip, and therefore removes a major barrier to the solid-state quantuminformation platforms based on QDs.

Tunable quantum dots in monolithic Fabry-Perot microcavities for high-performance single-photon sources