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Inline Coherent Imaging (ICI) is a reliable method for real-time monitoringof various laser processes, including keyhole welding, additive manufacturing,and micromachining. However, the axial resolution is limited to greater than 2{\mu}m making ICI unsuitable for monitoring submicron processes. Advancementsin Quantum Optical Coherence Tomography (QOCT), which uses a Hong-Ou-Mandel(HOM) interferometer, has the potential to address this issue by achievingbetter than 1 {\mu}m depth resolution. While time-resolved QOCT is slow,Fourier domain QOCT (FD-QOCT) overcomes this limitation, enabling submicronscale real-time process monitoring. Here we review the fundamentals of FD-QOCTand QOCT and propose a Quantum Inline Coherent Imaging system based on FD-QOCT.Using frequency entangled sources available today the system has a theoreticalresolution of 0.17 microns, making it suitable for submicron real-time processmonitoring.

Theoretical framework for real time sub-micron depth monitoring using quantum inline coherent imaging