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Atom probe tomography requires needle-shaped specimens with a diametertypically below 100 nm, making them both very fragile and reactive, and defects(notches at grain boundaries or precipitates) are known to affect the yield anddata quality. The use of a conformal coating directly on the sharpened specimenhas been proposed to increase yield and reduce background. However, to date,these coatings have been applied ex-situ and mostly are not uniformly. Here, wereport on the controlled focused ion beam in-situ deposition of a thin metalfilm on specimens immediately after specimen preparation. Different metallictargets e.g. Cr were attached to a micromanipulator via a conventional lift-outmethod and sputtered using the Ga or Xe ions. We showcase the many advantagesof coating specimens from metallic to non-metallic materials. We haveidentified an increase in data quality and yield, an improvement of the massresolution, as well as an increase in the effective field-of-view enablingvisualization of the entire original specimen, including the complete surfaceoxide layer. The ease of implementation of the approach makes it veryattractive for generalizing its use across a very wide range of atom probeanalyses.

In-situ metallic coating of atom probe specimen for enhanced yield, performance, and increased field-of-view