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An in-process coherent imaging diagnostic has been developed to real-timemeasure the hole depth during air-film hole drilling by a femtosecond laser. Asuper-luminescent diode with a wavelength of 830~13 nm is chosen as thecoherent light source which determines a depth resolution of 12 {\mu}m. Thedrilled hole is coupled as a part of the sample arm and the depth variation canbe extracted from the length variation of the optical path. Interference isrealized in the detection part and a code has been written to discriminate theinterference fringes. Density of plasma in the hole is diagnosed to evaluateits amendment to the optical path length and the depth measurement errorinduced by plasma is non-ignorable when drilling deep holes.

A real-time hole depth diagnostic based on coherent imaging with plasma amendment during femtosecondlaser hole-drilling