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Far-UVC light in the wavelength range of 200-230 nm has attracted renewedinterest because of its safety for human exposure and effectiveness ininactivating pathogens. Here we present a compact solid-state far-UVC lasersource based on second-harmonic generation (SHG) using a low-costcommercially-available blue laser diode pump. Leveraging the high intensity oflight in a nanophotonic waveguide and heterogeneous integration, our approachachieves Cherenkov phase-matching across a bonded interface consisting of asilicon nitride (SiN) waveguide and a beta barium borate (BBO) nonlinearcrystal. Through systematic investigations of waveguide dimensions and pumppower, we analyze the dependencies of Cherenkov emission angle, conversionefficiency, and output power. Experimental results confirm the feasibility ofgenerating far-UVC, paving the way for mass production in a compact formfactor. This solid-state far-UVC laser source shows significant potential forapplications in human-safe disinfection, non-line-of-sight free-spacecommunication, and deep-UV Raman spectroscopy.

Continuous-wave second-harmonic generation in the far-UVC pumped by a blue laser diode