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We present the development of a versatile apparatus for a 6.2 eV laser-basedtime and angle-resolved photoemission spectroscopy with micrometer spatialresolution (time-resolved $\mu$-ARPES). With a combination of tunable spatialresolution down to $\sim$11 $\mu$m, high energy resolution ($\sim$11 meV),near-transform-limited temporal resolution ($\sim$280 fs), and tunable 1.55 eVpump fluence up to $\sim$3 mJ/cm$^2$, this time-resolved $\mu$-ARPES systemenables the measurement of ultrafast electron dynamics in exfoliated andinhomogeneous materials. We demonstrate the performance of our system bycorrelating the spectral broadening of the topological surface state ofBi$_2$Se$_3$ with the spatial dimension of the probe pulse, as well asresolving the spatial inhomogeneity contribution to the observed spectralbroadening. Finally, after in-situ exfoliation, we performed time-resolved$\mu$-ARPES on a $\sim$30 $\mu$m few-layer-thick flake of transition metaldichalcogenide WTe$_2$, thus demonstrating the ability to access ultrafastelectron dynamics with momentum resolution on micro-exfoliated and twistedmaterials.

A versatile laser-based apparatus for time-resolved ARPES with micro-scale spatial resolution