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Microplasmas can be used for a wide range of technological applications andto improve our understanding of fundamental physics. Scanning electronmicroscopy, on the other hand, provides insights into the sample morphology andchemistry of materials from the mm-down to the nm-scale. Combining both wouldprovide direct insight into plasma-sample interactions in real-time and at highspatial resolution. Up till now, very few attempts in this direction have beenmade, and significant challenges remain. This work presents a stable directcurrent glow discharge microplasma setup built inside a scanning electronmicroscope. The experimental setup is capable of real-time in-situ imaging ofthe sample evolution during plasma operation and it demonstrates localizedsputtering and sample oxidation. Further, the experimental parameters such asvarying gas mixtures, electrode polarity, and field strength are explored andexperimental $V$-$I$ curves under various conditions are provided. Theseresults demonstrate the capabilities of this setup in potential investigationsof plasma physics, plasma-surface interactions, and materials science and itspractical applications. The presented setup shows the potential to have severaltechnological applications, e.g., to locally modify the sample surface (e.g.,local oxidation and ion implantation for nanotechnology applications) on the$\mu$m-scale.

In-situ Plasma Studies using a Direct Current Microplasma in a Scanning Electron Microscope