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In assessing piezoresistive microcantilever sensitivity for surface stresssensing, the key is its capacity to translate surface stress into changes inresistance. This change hinges on the interplay between stresses andpiezoresistivity. Traditional optimization has been constrained by rudimentary1D models, overlooking potentially superior designs. Addressing this, weemployed topology optimization to optimize Si(100) microcantilevers with ap-type piezoresistor. This led to optimized designs with up to 30% enhancedsensitivity over conventional designs. A recurrent "double-cantilever"configuration emerged, which optimizes longitudinal stress and reducestransverse stress at the piezoresistor, resulting in enhanced sensitivity. Wedeveloped a simplified model to analyze stress distributions in these designs.By adjusting geometrical features in this model, we identified ideal parametercombinations for optimal stress distribution. Contrary to conventional designsfavoring short cantilevers, our findings redefine efficient surface stresssensing, paving the way for innovative sensor designs beyond the conventionalrectangular cantilevers.

Tailoring Stresses in Piezoresistive Microcantilevers for Enhanced Surface Stress Sensing: Insights from Topology Optimization