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For a smooth surface, the chemical composition can be readily evaluated by avariety of spectroscopy techniques; a prominent example is X-ray photoelectronspectroscopy (XPS), where the relative proportions of the elements are mainlydetermined by the intensity ratio of the element-specific photoelectrons. Thisdeduction, however, is more intricate for a nanorough surface, such as blacksilicon, since the steep slopes of the geometry mimic local variations of thelocal emission angle. Here, we explicitly quantify this effect via an integralgeometric analysis, by using so-called Minkowski tensors. Thus, we match thechemical information from XPS with topographical information from atomic forcemicroscopy (AFM). Our method provides reliable estimates of layer thicknessesfor nanorough surfaces. For our black silicon samples, we found that the oxidelayer thickness is on average comparable to that of a native oxide layer. Ourstudy highlights the impact of complex geometries at the nanoscale on theanalysis of chemical properties with implications for a broad class ofspectroscopy techniques.

Impact of geometry on chemical analysis exemplified for photoelectron spectroscopy of black silicon