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The design of transparent conductive electrodes (TCEs) for optoelectronicdevices requires a trade-off between high conductivity or transmittivity,limiting their efficiency. This paper demonstrates a novel approach tofabricating TCEs that effectively alleviates this trade-off: a monolithic GaAshigh contrast grating integrated with metal (metalMHCG). The metalMHCG enableshigher electrical conductivity than other TCEs, while providing transmissiveand antireflective properties. We focus on infrared spectrum TCEs, which areessential for sensing, thermal imaging, and automotive applications. However,due to elevated free carrier absorption they are much more demanding than TCEsfor the visible spectrum. We demonstrate 75% absolute transmittiance ofunpolarized light, resulting in 108% transmittance relative to plain GaAssubstrate. We achieved even larger absolute transmittance of polarized light,reaching 92% or 133% relative transmittance. Despite record high transmittance,the sheet resistance of the metalMHCG is several times lower than any otherTCE, ranging from 0.5 to 1 Ohm/Sq.

Monolithic High Contrast Grating Integrated with Metal: Infrared Electrode with Exceptionally High Conductivity and Transmission