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Plasma simulations are powerful tools for understanding fundamental plasmascience phenomena and for process optimization in applications. To ensure theirquantitative accuracy, they must be validated against experiments. In thiswork, such an experimental validation is performed for a 1d3v particle-in-cellsimulation complemented with the Monte Carlo treatment of collision processesof a capacitively coupled radio frequency plasma driven at 13.56 MHz andoperated in neon gas. In a geometrically symmetric reactor the electron densityin the discharge center and the spatio-temporal distribution of the electronimpact excitation rate from the ground into the Ne 2p$_1$ state are measured bya microwave cutoff probe and phase resolved optical emission spectroscopy,respectively. The measurements are conducted for electrode gaps between 50 mmand 90 mm, neutral gas pressures between 20 mTorr and 50 mTorr, andpeak-to-peak values of the driving voltage waveform between 250 V and 650 V.Simulations are performed under identical discharge conditions. In thesimulations, various combinations of surface coefficients characterising theinteractions of electrons and heavy particles with the anodized aluminiumelectrode surfaces are adopted. We find, that the simulations using a constanteffective heavy particle induced secondary electron emission coefficient of 0.3and a realistic electron-surface interaction model (which considersenergy-dependent and material specific elastic and inelastic electronreflection, as well as the emission of true secondary electrons from thesurface) yield results which are in good quantitative agreement with theexperimental data.

Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas