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Metasurfaces, optics made from subwavelength-scale nanostructures, have beenlimited to millimeter-sizes by the scaling challenge of producing vast numbersof precisely engineered elements over a large area. In this study, wedemonstrate an all-glass 100 mm diameter metasurface lens (metalens) comprising18.7 billion nanostructures that operates in the visible spectrum with a fastf-number (f/1.5, NA=0.32) using deep-ultraviolet (DUV) projection lithography.Our work overcomes the exposure area constraints of lithography tools anddemonstrates that large metasurfaces are commercially feasible. Additionally,we investigate the impact of various fabrication errors on the imaging qualityof the metalens, several of which are unique to such large area metasurfaces.We demonstrate direct astronomical imaging of the Sun, the Moon, and emissionnebulae at visible wavelengths and validate the robustness of such metasurfacesunder extreme environmental thermal swings for space applications.

All-glass 100 mm Diameter Visible Metalens for Imaging the Cosmos