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Active microelectromechanical systems can couple the nanomechanical domainwith the electronic domain by integrating electronic sensing and actuationmechanisms into the micromechanical device. This enables very fast andsensitive measurements of force, acceleration, or the presence of biologicalanalytes. In particular, strain sensors integrated onto MEMS cantilevers arewidely used to transduce an applied force to an electrically measurable signalin applications like atomic force microscopy, mass sensing, or moleculardetection. However, the high Young's moduli of traditional cantilever materials(silicon or silicon nitride) limit the thickness of the devices, and thereforethe deflection sensitivity that can be obtained for a specific spring constant.Using softer materials such as polymers as the structural material of the MEMSdevice would overcome this problem. However, these materials are incompatiblewith high-temperature fabrication processes often required to fabricate highquality electronic strain sensors. We introduce a pioneering solution thatseamlessly integrates the benefits of polymer MEMS technology with theremarkable sensitivity of strain sensors, even under high-temperaturedeposition conditions. Cantilevers made using this technology are inherentlyfluid compatible and have shown up to 6 times lower force noise than theirconventional counterparts. We demonstrate the benefits and versatility of thispolymer/ceramic/semiconductor multi-layer fabrication approach with theexamples of self-sensing AFM cantilevers, and membrane surface stress sensorsfor biomolecule detection.

A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics