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This feature article presents insights concerning the correlation of PECVDand PEALD thin film structures with their barrier or membrane properties. Whilein principle similar precursor gases and processes can be applied, theadjustment of deposition parameters for different polymer substrates can leadto either an effective diffusion barrier or selective permeabilities. In bothcases the understanding of the film growth and the analysis of the pore sizedistribution and the pore surface chemistry is of utmost importance for theunderstanding of the related transport properties of small molecules. In thisregard the article presents both concepts of thin film engineering andanalytical as well as theoretical approaches leading to a comprehensivedescription of the state of the art in this field. Moreover, based on thepresented correlation of film structure and molecular transport propertiesperspectives of future relevant research in this area is presented.

PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films