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Traceability of precision instrument and measuring method is the core issuein metrology science. In the field of nanometer length measurement, the laserinterferometers are usually used to trace the measurement value to the laserwavelength, but the laser wavelength is sensitive to the environmentdisturbance. Chromium self-traceable grating is an ideal nanometer lengthreference grating with pitch traceability, fabricated by the atomic lithographytechnique. The new nanometer length traceability chain can be established basedon the pitch traceability of chromium self-traceable grating, which is oftenused to calibrate the systematic error of the atomic force microscope. In thispaper, the metrological self-mixing grating interferometer based on thechromium self-traceable grating (SMGI-Cr) is firstly established, whoseinterfere phase is traceable to the pitch of the chromium self-traceablegrating directly and traceable to the chromium atomic transition frequency ofenergy level 7 S 3 to 7 P 4 indirectly. The nanometer displacement measurementis also achieved by the SMGI-Cr. The measurement error is no more than 0.2366%,compared to a commercial interferometer.

Nanometer displacement measurement based on metrological self-mixing  grating interferometer traceable to the pitch standard of one-dimension  chromium self-traceable grating