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Plasma processing using a mixture of noble gas and oxygen is a technique thatis currently being used to reduce field emission and multipacting inaccelerating cavities. Plasma is created inside the cavity when the gas mixtureis exposed to an electromagnetic field that is generated by applying RF powerthrough the fundamental power or higher-order mode couplers. Oxygen ions andatomic oxygen are created in the plasma which breaks down the hydrocarbons onthe surface of the cavity and the residuals from this process are removed aspart of the process gas flow. Removal of hydrocarbons from the surfaceincreases the work function and reduces the secondary emission coefficient.This work describes the initial results of plasma simulation, which providesinsight into the ignition process, distribution of different species, andinteractions of free oxygen and oxygen ions with the cavity surfaces. Thesimulations have been done with an Ar/O2 plasma using COMSOL multiphysics.These simulations help in understanding the dynamics and control of plasmainside the cavity and the exploration of different gas mixtures.

Simulation of the dynamics of gas mixtures during plasma processing in the C75 Cavity