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Colour centre ensembles in diamond have been the subject of intensiveinvestigation for many applications including single photon sources for quantumcommunication, quantum computation with optical inputs and outputs, andmagnetic field sensing down to the nanoscale. Some of these applications arerealised with a single centre or randomly distributed ensembles in chips, butthe most demanding application for a large-scale quantum computer will requireordered arrays. By configuring an electronic-grade diamond substrate with abiased surface graphene electrode connected to charge-sensitive electronics, itis possible to demonstrate deterministic single ion implantation for ionsstopping between 30 and 130~nm deep from a typical stochastic ion source. Animplantation event is signalled by a charge pulse induced by the drift ofelectron-hole pairs from the ion implantation. The ion implantation site islocalised with an AFM nanostencil or a focused ion beam. This allows theconstruction of ordered arrays of single atoms with associated colour centresthat paves the way for the fabrication of deterministic colour center networksin a monolithic device.

Graphene-Enhanced Single Ion Detectors for Deterministic Near-Surface Dopant Implantation in Diamond