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Controlling large-scale many-body quantum systems at the level of singlephotons and single atomic systems is a central goal in quantum informationscience and technology. Intensive research and development has propelledfoundry-based silicon-on-insulator photonic integrated circuits to a leadingplatform for large-scale optical control with individual mode programmability.However, integrating atomic quantum systems with single-emitter tunabilityremains an open challenge. Here, we overcome this barrier through the hybridintegration of multiple InAs/InP microchiplets containing high-brightnessinfrared semiconductor quantum dot single photon emitters into advancedsilicon-on-insulator photonic integrated circuits fabricated in a 300~mmfoundry process. With this platform, we achieve single photon emission viaresonance fluorescence and scalable emission wavelength tunability through anelectrically controlled non-volatile memory. The combined control of photonicand quantum systems opens the door to programmable quantum informationprocessors manufactured in leading semiconductor foundries.

Tunable quantum emitters on large-scale foundry silicon photonics