English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

The effect of driving frequency in the range of 13.56 MHz to 73 MHz onelectron energy distribution and electron heating modes in a 50 mTorrcapacitively coupled argon plasma discharge is studied using 1D-3Vparticle-in-cell simulations. Calculated electron energy probability functionsexhibit three distinct ``temperatures'' for low-, mid-, and high-energyelectrons. When compared to published experimental data, the calculatedprobability functions show a reasonable agreement for the energy range resolvedin the measurements (about 2 eV to 10 eV). Discrepancies outside this rangelead to differences between computational and experimental values of theelectron number density determined from the distribution functions, but thepredicted effective electron temperature is within 25\% of experimental values.The impedance of the discharge is interpreted in terms of a homogeneousequivalent circuit model and the driving frequency dependence of the inferredcombined sheath thickness is found to obey a known, theoretically-derived,power law. The average power transferred from the field to the electrons(electron heating) is computed, and a region of negative heating near thesheath edge, particularly at higher driving frequencies, is identified.Analysis of the electron momentum equation shows that electron inertia, whichwould average to zero in a linear regime, is responsible for negative values ofpower deposition near the sheath edge at high driving frequencies due to thehighly nonlinear behavior of the discharge.

Particle-in-cell simulation of a 50~mTorr capacitively coupled argon discharge over a range of frequencies