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The high critical magnetic field and relatively high critical temperature ofniobium nitride (NbN) make it a promising material candidate for applicationsin superconducting quantum technology. However, NbN-based devices and circuitsare sensitive to decoherence sources such as two-level system (TLS) defects.Here, we numerically and experimentally investigate NbN superconductingmicrowave coplanar waveguide resonator arrays, with a 100 nm thickness,capacitively coupled to a common coplanar waveguide on a silicon chip. Weobserve that the resonators' internal quality factor (Qi) decreases from Qi ~1.07*10^6 in a high power regime (< nph > = 27000) to Qi ~ 1.36 *10^5 in singlephoton regime at temperature T = 100 mK. Data from this study is consistentwith the TLS theory, which describes the TLS interactions in resonatorsubstrates and interfaces. Moreover, we study the temperature dependenceinternal quality factor and frequency tuning of the coplanar waveguideresonators to characterise the quasiparticle density of NbN. We observe thatthe increase in kinetic inductance at higher temperatures is the main reasonfor the frequency shift. Finally, we measure the resonators' resonancefrequency and internal quality factor at single photon regime in response toin-plane magnetic fields B||. We verify that Qi stays well above 10^4 up to B||= 240 mT in the photon number < nph > = 1.8 at T = 100 mK. Our results may pavethe way for realising robust microwave superconducting circuits for circuitquantum electrodynamics (cQED) at high magnetic fields necessary forfault-tolerant quantum computing, and ultrasensitive quantum sensing.

Characterizing Niobium Nitride Superconducting Microwave Coplanar  Waveguide Resonator Array for Circuit Quantum Electrodynamics in Extreme  Conditions