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Fano noise, readout noise, and the partial charge collection (PCC) effectcollectively contribute to the degradation of energy spectra in Charge CoupledDevices (CCD) measurements, especially at low energies. In this work, the X-rayproduced by the fluorescence of fluorine (677 eV) and aluminum (1486 eV) wererecorded using a Skipper-CCD, which enabled the reading noise to be reduced to0.2 e-. Based on an analytical description of photopeak shapes resulting fromthe convolution of the PCC effect and Fano noise, we achieved a precisecharacterization of the energy spectra. This description enabled us todisentangle and quantify the contributions from both Fano noise and the PCCeffect. As a result, we determined the Fano factor and the electron-hole paircreation energy. Additionally, we estimated the PCC-region of the sensor and,for the first time, experimentally observed the expected skewness of photopeaksat low energies.

Unraveling Fano noise and partial charge collection effect in X-ray spectra below 1 keV