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Ultracompact chip-integrated single-photon sources of collimated beams withpolarizationencoded states are crucial for integrated quantum technologies.However, most of currently available single-photon sources rely on externalbulky optical components to shape the polarization and phase front of emittedphoton beams. Efficient integration of quantum emitters with beam shaping andpolarization encoding functionalities remains so far elusive. Here, we presentultracompact single-photon sources of linearly polarized vortex beams based onchip-integrated quantum emitter-coupled metasurfaces, which are meticulouslydesigned by fully exploiting the potential of nanobrick arrayed metasurfaces.We first demonstrate on-chip single-photon generation of high-purity linearlypolarized vortex beams with prescribed topological charges of -1, 0, and +1. Wefurther realize multiplexing of single-photon emission channels with orthogonallinear polarizations carrying different topological charges and demonstratetheir entanglement. Our work illustrates the potential and feasibility ofultracompact quantum emitter-coupled metasurfaces as a new quantum opticsplatform for realizing chip-integrated high-dimensional single-photon sources.

Ultracompact single-photon sources of linearly polarized vortex beams