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Multifocal laser direct writing (LDW) based on phase-only spatial lightmodulator (SLM) can realize flexible and parallel nanofabrication with highthroughput potential. In this investigation, a novel approach of combiningtwo-photon absorption, SLM and vector path guided by scalable vector graphics(SVG) has been developed and tested preliminarily, for fast, flexible andparallel nanofabrication. Three laser focuses are independently controlled withdifferent paths, which are according to SVG, to optimize fabrication andpromote time efficiency. The minimum structure width can be as low as 74 nm.Accompanied with a translation stage, a carp structure of 18.16 $\mu$m by 24.35$\mu$m has been fabricated. This method shows the possibility of developing LDWtechniques towards full-electrical system, and provides a potential way toefficiently engrave complex structures on nanoscales.

Multifocal laser direct writing through spatial light modulation guided by scalable vector graphics