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Most properties of solid materials are defined by their internal electricfield and charge density distributions which so far have been difficult tomeasure with sufficient spatial resolution. For 2D materials, the electricfield at the atomic level in particular influences the optoelectronicproperties. In this study, the atomic-scale electric field and charge densitydistribution of 2D WSe$_2$ are revealed by using an emerging microscopytechnique, differential phase contrast (DPC) imaging in the scanningtransmission electron microscope (STEM). Combined with high-angle annulardark-field imaging the charge density distribution of bi- and trilayers ofWSe$_2$ is mapped. A measured higher positive charge density located at theselenium atomic columns compared to the tungsten atomic columns is reported,and possible reasons are discussed. Furthermore, the change in the electricfield distribution of a selenium point defect in a trilayer is investigatedexhibiting a characteristic electric field distribution in the vicinity of thedefect: there are characteristic regions with locally enhanced and with locallyreduced electric field magnitudes compared to the pristine lattice.

Investigation of the Electric Field and Charge Density Distribution of pristine and defective 2D WSe$_2$ by Differential Phase Contrast Imaging