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Nanoelectromechanical systems (NEMS) have proven outstanding performance inthe detection of small masses down to single proton sensitivity. To obtain ahigh enough throughput for the application in practical mass spectrometry, NEMSresonators have to be arranged in two-dimensional (2D) arrays. However, allstate-of-the-art electromechanical transduction methods rely on electricallines placed close to the mechanical resonators, which drastically restrictsthe density of 2D resonator arrays. An exception is the transduction by surfaceacoustic waves (SAWs), which has so far only been shown for the transduction ofsingle nanomechanical pillar resonators. Here, we demonstrate the transductionof pillar pairs by surface acoustic waves. The pillars have a diameter of 700nm and show a mass responsivity of -588$\pm$98 ng$^{-1}$. The distances betweenthe pillar pairs are 70 nm and 14.3 $\mu$m. SAW transduction enabled us tomeasure both pillars of each pair with electrical lines no closer than 300$\mu$m, illustrating the potential of SAWs to transduce dense arrays of pillarresonators, a crucial step towards practical mass spectrometry with NEMS.

Towards practical mass spectrometry with nanomechanical pillar resonators by surface acoustic wave transduction