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Integrated quantum photonics (IQP) provides a path to practical, scalablequantum computation, communications and information processing. Realization ofan IQP platform requires integration of quantum emitters with high qualityphotonic circuits. However, the range of materials for monolithic platforms islimited by the simultaneous need for a high-quality single photon source, highoptical performance and availability of scalable nanofabrication techniques.Here we demonstrate the fabrication of IQP components from the recently emergedquantum material hexagonal boron nitride (hBN), including tapered waveguides,microdisks, and 1D and 2D photonic crystal cavities. Resonators with qualityfactors greater than 4000 are achieved, and we engineer proof-of-principlecomplex, free-standing IQP circuitry fabricated from single crystal hBN. Ourresults show the potential of hBN for scalable integrated quantum technologies.

Monolithic Platform for Integrated Quantum Photonics with Hexagonal Boron Nitride