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Permalloy, despite being a widely utilized soft magnetic material, stillcalls for optimization in terms of magnetic softness and magnetostriction forits use in magnetoresistive sensor applications. Conventional annealing methodsare often insufficient to locally achieve the desired properties for a narrowparameter range. In this study, we report a significant improvement of themagnetic softness and magnetostriction in a 30 nm Permalloy film after He$^+$irradiation. Compared to the as-deposited state, the irradiation treatmentreduces the induced anisotropy by a factor ten and the hard axis coercivity bya factor five. In addition, the effective magnetostriction of the film issignificantly reduced by a factor ten - below $1\times10^{-7}$ - afterirradiation. All the above mentioned effects can be attributed to the isotropiccrystallite growth of the Ni-Fe alloy and to the intermixing at the magneticlayer interfaces under light ion irradiation. We support our findings withX-ray diffraction analysis of the textured Ni$_{81}$Fe$_{19}$ alloy.Importantly, the sizable magnetoresistance is preserved after the irradiation.Our results show that compared to traditional annealing methods, the use ofHe$^+$ irradiation leads to significant improvements in the magnetic softnessand reduces strain cross sensitivity in Permalloy films required for 3Dpositioning and compass applications. These improvements, in combination withthe local nature of the irradiation process make our finding valuable for theoptimization of monolithic integrated sensors, where classic annealing methodscannot be applied due to complex interplay within the components in the device.

Optimization of Permalloy properties for magnetic field sensors using He$^+$ irradiation