English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

Nano-fabrication in silicon, arguably the most important material for moderntechnology, has been limited exclusively to its surface. Existing lithographicmethods cannot penetrate the wafer surface without altering it, whereasemerging laser-based subsurface or in-chip fabrication remains at > 1micrometer resolution. In addition, available methods do not allow positioningor modulation with sub-micron precision deep inside the wafer. The fundamentaldifficulty of breaking these dimensional barriers are two-fold, i.e., complexnonlinear effects inside the wafer and the inherent diffraction limit for laserlight. Here, we overcome these challenges by using structured-laser-beams andexploiting preformed subsurface structures as seed, in order to establish thefirst controlled nano-fabrication capability inside silicon. We demonstrateburied nano-structures of feature sizes down to 100 nm +- 25 nm, withsub-wavelength and multi-dimensional control; thereby improving thestate-of-the-art by an order-of-magnitude. In order to showcase the photoniccapabilities, we fabricated the first in-chip nano-photonic elements, i.e.,nano-gratings with record diffraction efficiency and spectral control. Thereported advance is an important step towards in-chip nano-photonic systems,micro-/nano-fluidics & NEMS/MEMS, and 3D electronic-photonic integration.

Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding