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A compact large-range six-degrees-of-freedom (six-DOF) parallel positioningsystem with high resolution, high resonant frequency, and high repeatabilitywas proposed. It mainly consists of three identical kinematic sections. Eachkinematic section consists of two identical displacement amplification andguiding mechanisms, which are finally connected to a limb. Each limb wasdesigned with a universal joint at each end and connected to a moving stage. Acomputational model of the positioner was built in the ANSYS software package,hence, the input stiffness, output compliance, range, and modal analysis of thesystem were found. Furthermore, a monolithic prototype made of AcrylonitrileButadiene Styrene (ABS) was successfully manufactured by the 3D-printingprocess. It was actuated and sensed by piezoelectric actuators (PEAs) andcapacitive displacement sensors, respectively. Finally, the performances ofthis proposed positioner were experimentally investigated. The positioningresolution was achieved as 10.5nm {\times} 10.5nm {\times} 15nm {\times}1.8{\mu}rad {\times} 1.3{\mu}rad {\times} 0.5{\mu}rad. The experimental resultsvalidate the behavior and capabilities of the proposed positioning system, andalso verify the nanometer-scale spatial positioning accuracy within the overallstroke range. Practical applications of the proposed system can be expanded topick-and-place manipulation, vibration-canceling inmicrosurgery/micro-assembly, and collaborative manipulators systems.

Monolithic Six-DOF Parallel Positioning System for High-precision and Large-range Applications