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Spectro-ptychography offers improved spatial resolution and additional phasespectral information relative to that provided by scanning transmission X-raymicroscopes (STXM). However, carrying out ptychography at the lower range ofsoft X-ray energies (e.g., below 200 eV to 600 eV) on samples with weaklyscattering signals can be challenging. We present soft X-ray ptychographyresults at energies as low as 180 eV and illustrate the capabilities withresults from permalloy nanorods (Fe 2p), carbon nanotubes (C 1s), and boronnitride bamboo nanostructures (B 1s, N1s). We describe optimization of lowenergy X-ray spectro-ptychography and discuss important challenges associatedwith measurement approaches, reconstruction algorithms, and their effects onthe reconstructed images. A method for evaluating the increase in radiationdose when using overlapping sampling is presented.

Soft X-ray spectro-ptychography on boron nitride nanotubes, carbon nanotubes and permalloy nanorods