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Precision motion stages are playing a prominent role in various manufacturingequipment. The drastically increasing demand for higher throughput inintegrated circuit (IC) manufacturing and inspection calls for thenext-generation precision stages that have light weight and high controlbandwidth simultaneously. In today's design techniques, the stage's firstflexible mode is limiting its achievable control bandwidth, which enforces atrade-off between the stage's acceleration and closed-loop stiffness and thuslimits the system's overall performance. To overcome this challenge, this paperproposes a new hardware design and control framework for lightweight precisionmotion stages with the stage's low-frequency flexible modes activelycontrolled. Our method proposes to minimize the resonance frequency of thecontrolled mode to reduce the stage's weight, and to maximize that of theuncontrolled mode to enable high control bandwidth. In addition, the proposedframework determines the placement of the actuators and sensors to maximize thecontrollability/observability of the stage's controlled flexible mode whileminimizing that of the uncontrolled mode, which effectively simplifies thecontroller designs. Two case studies are used to evaluate the effectiveness ofthe proposed framework. Simulation results show that the stage designed usingthe proposed method has a weight reduction of more than 55% compared to abaseline stage design. Improvement in control bandwidth was also achieved.These results demonstrate the effectiveness of the proposed method in achievinglightweight precision positioning stages with high acceleration, bandwidth, andprecision.

Sequential Structure and Control Co-design of Lightweight Precision Stages with Active control of flexible modes