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X-ray nanotomography is a powerful tool for the characterization of nanoscalematerials and structures, but is difficult to implement due to competingrequirements on X-ray flux and spot size. Due to this constraint,state-of-the-art nanotomography is predominantly performed at large synchrotronfacilities. Compact X-ray nanotomography tools operated in standard analysislaboratories exist, but are limited by X-ray optics and destructive samplepreparation techniques. We present a laboratory-scale nanotomography instrumentthat achieves nanoscale spatial resolution while changing the limitations ofconventional tomography tools. The instrument combines the electron beam of ascanning electron microscope (SEM) with the precise, broadband X-ray detectionof a superconducting transition-edge sensor (TES) microcalorimeter. Theelectron beam generates a highly focused X-ray spot in a metal target, whilethe TES spectrometer isolates target photons with high signal-to-noise. Thiscombination of a focused X-ray spot, energy-resolved X-ray detection, andunique system geometry enable nanoscale, element-specific X-ray imaging in acompact footprint. The proof-of-concept for this approach to X-raynanotomography is demonstrated by imaging 160 nm features in three dimensionsin a Cu-SiO2 integrated circuit, and a path towards finer resolution andenhanced imaging capabilities is discussed.

A Tabletop X-Ray Tomography Instrument for Nanometer-Scale Imaging:  Integration of a Scanning Electron Microscope with a Transition-Edge Sensor  Spectrometer