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X-ray nanotomography is a powerful tool for the characterization of nanoscalematerials and structures, but is difficult to implement due to competingrequirements on X-ray flux and spot size. Due to this constraint,state-of-the-art nanotomography is predominantly performed at large synchrotronfacilities. We present a laboratory-scale nanotomography instrument thatachieves nanoscale spatial resolution while changing the limitations ofconventional tomography tools. The instrument combines the electron beam of ascanning electron microscope (SEM) with the precise, broadband X-ray detectionof a superconducting transition-edge sensor (TES) microcalorimeter. Theelectron beam generates a highly focused X-ray spot in a metal target heldmicrometers away from the sample of interest, while the TES spectrometerisolates target photons with high signal-to-noise. This combination of afocused X-ray spot, energy-resolved X-ray detection, and unique system geometryenable nanoscale, element-specific X-ray imaging in a compact footprint. Theproof-of-concept for this approach to X-ray nanotomography is demonstrated byimaging 160 nm features in three dimensions in 6 layers of a Cu-SiO2 integratedcircuit, and a path towards finer resolution and enhanced imaging capabilitiesis discussed.

Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer