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This work introduces the design analysis simulation and a standard MEMSfabrication process for a three dimensional microcoil with a magnetic core anda digital switch configuration using a completely integrated fully MEMScompatible process to achieve a digitally controlled inductance. The proposeddesign can also be utilized as a micro transformer. The proposed designconsists of five identical 3D coils and their corresponding MEMS switches.These coils are digitally controlled to achieve a variable inductor rangingfrom one fifth of the coil inductance up to five times the coil inductance. Astandard five layer Polymumps process is proposed to fabricate the microcoilsand the integrated switches. Each micro coil is anchored directly on chipconnected to the input signal from one side and the other is connected to theswitch. The Ni based magnetic core improves the coil response by confining andguiding the magnetic field in the magnetic device compared to Si core based bymore than five times. The presented coil has the number of windings limited bythe designed length and the minimum spacing that can be realized by standardoptical lithography. The coil diameter is also restricted by the limits definedby optical lithography whereas the maximum height realizable by the Polymumpsprocess limits the height of the magnetic core and accordingly results in lowerinductor performance. Based on this technique we present coils ranging from 100um in length and ten winding up to 1000 um in length and 100 windings. The newmonolithically integrated MEMS switches act as selectors to achieve a variableinductance with digital control to allow the selection among n inductance stepswhere n is the number of coils.

Design and Simulation of a Micro-coiled Digitally-Controlled Variable Inductor with a Monolithically Integrated MEMS Switch