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Whispering gallery mode (WGM) microcavities have been widely used forhigh-sensitivity ultrasound detection, due to their optical and mechanicalresonances enhanced sensitivity. The ultrasound sensitivity of the cavityoptomechanical system is fundamentally limited by the thermal noise. In thiswork, we theoretically and experimentally investigate the thermal-noise-limitedsensitivity of a WGM microdisk ultrasound sensor, and optimize the sensitivityby varying the radius and thickness of the microdisk, as well as using a trenchstructure around the disk. Using a microdisk with a radius of 300 um andthickness of 2 um, a peak sensitivity of 1.18 uPa Hz^{-1/2} is achieved at 82.6kHz, which is to our knowledge the record sensitivity among the cavityoptomechanical ultrasound sensors. Such high sensitivity can improve thedetection range of air-coupled ultrasound sensing technology.

Micropascal-sensitivity ultrasound sensors based on optical microcavities