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Recent scientific and technological advances have enabled the detection ofgravitational waves, autonomous driving, and the proposal of a communicationsnetwork on the Moon (Lunar Internet or LunaNet). These efforts are based on themeasurement of minute displacements and correspondingly the forces or fieldstransduction, which translate to acceleration, velocity, and positiondetermination for navigation. State-of-the-art accelerometers use capacitive orpiezo resistive techniques, and micro-electromechanical systems (MEMS) viaintegrated circuit (IC) technologies in order to drive the transducer andconvert its output for electric readout. In recent years, laser optomechanicaltransduction and readout have enabled highly sensitive detection of motionaldisplacement. Here we further examine the theoretical framework for the novelmechanical frequency readout technique of optomechanical transduction when thesensor is driven into oscillation mode [8]. We demonstrate theoretical andphysical agreement and characterize the most relevant performance parameterswith a device with 1.5mg/Hz acceleration sensitivity, a 2.5 fm/Hz1/2displacement resolution corresponding to a 17.02 ug/Hz1/2 force-equivalentacceleration, and a 5.91 Hz/nW power sensitivity, at the thermodynamicallimits. In addition, we present a novel technique for dynamic range extensionwhile maintaining the precision sensing sensitivity. Our inertial accelerometeris integrated on-chip, and enabled for packaging, with a laser-detuning-enabledapproach.

Parametrically driven inertial sensing in chip-scale optomechanical cavities at the thermodynamical limits with extended dynamic range