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Drude model successfully quantifies the optical constants for bulk matter,but it is not suitable for subwavelength objects. In this paper, terahertznear-field optical microscopy and finite element simulation are used to studygold patches fabricated by Gallium etching. Electron transport is discovered indetermining the optical signal strength. The signal from substrate is morecomplicated and still not fully understood. As the etching area decreases,near-field interaction is not dominated by doping concentration, and a highersignal is observed near connected metals. With the help of simulation, theabnormal enhancement phenomenon is discussed in detail, which lays thefoundation for further experimental verification.

THz Nanoscopy of Metal and Gallium Implanted Silicon