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Two-dimensional (2D) Transition Metal Dichalcogenide semiconductor (TMDs)nanocircuits are deterministically engineered over large-scale substrates. Theoriginal approach combines large-area physical growth of 2D TMDs layer withhigh resolution thermal - Scanning Probe Lithography (t-SPL), to reshape theultra-thin semiconducting layers at the nanoscale level. We demonstrate theadditive nanofabrication of few-layer MoS2 nanostructures, grown in the2H-semiconducting TMD phase, as shown by their Raman vibrational fingerprintsand by their optoelectronic response. The electronic signatures of the MoS2nanostructures are locally identified by Kelvin probe force microscopyproviding chemical and compositional contrast at the nanometer scale. Finally,the potential role of the 2D TMD nanocircuits as building blocks ofdeterministic 2D semiconducting interconnections is demonstrated byhigh-resolution local conductivity maps showing the competitive transportproperties of these large-area nanolayers. This work thus provides a powerfulapproach to scalable nanofabrication of 2D nano-interconnects and van der Waalsheterostructures, and to their integration in real-world ultra-compactelectronic and photonic nanodevices.

Deterministic Thermal Sculpting of Large-Scale 2D Semiconductor Nanocircuits