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Many attractive photonics platforms still lack integrated photodetectors dueto inherent material incompatibilities and lack of process scalability,preventing their widespread deployment. Here we address the problem of scalablyintegrating photodetectors in a photonic platform-independent manner. Using athermal evaporation and deposition technique developed for nanoelectronics, weshow that tellurium (Te), a quasi-2D semi-conductive element, can be evaporatedat low temperature directly onto photonic chips to form air-stable,high-responsivity, high-speed, ultrawide-band photodetectors. We demonstratedetection at visible, telecom, and mid-infrared wavelengths, a bandwidth ofmore than 40 GHz, and platform-independent scalable integration with photonicstructures in silicon, silicon nitride and lithium niobate.

Platform-agnostic waveguide integration of high-speed photodetectors with evaporated tellurium thin films