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Metalenses, which exhibit superior light-modulating performance withsub-micrometer-scale thicknesses, are suitable alternatives to conventionalbulky refractive lenses. However, fabrication limitations, such as a high cost,low throughput, and small patterning area, hinder their mass production. Here,we demonstrate the mass production of low-cost, high-throughput, andlarge-aperture visible metalenses using an argon fluoride immersion scanner andwafer-scale nanoimprint lithography. Once a 12-inch master stamp is imprinted,hundreds of centimeter-scale metalenses can be fabricated. To enhance lightconfinement, the printed metasurface is thinly coated with a high-index film,resulting in drastic increase of conversion efficiency. As a proof of concept,a prototype of a virtual reality device with ultralow thickness is demonstratedwith the fabricated metalens.

Scalably manufactured high-index atomic layer-polymer hybrid metasurfaces for high-efficiency virtual reality metaoptics in the visible