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Optical parametric oscillators are widely used to generate coherent light atfrequencies not accessible by conventional laser gain. However, chip-basedparametric oscillators operating in the visible spectrum have suffered frompump-to-signal conversion efficiencies typically less than 0.1 %. Here, wedemonstrate efficient optical parametric oscillators based on silicon nitridephotonics that address frequencies between 260 THz (1150 nm) and 510 THz (590nm). Pumping silicon nitride microrings near 385 THz (780 nm) yieldsmonochromatic signal and idler waves with unprecedented output powers in thiswavelength range. We estimate on-chip output powers (separately for the signaland idler) between 1 mW and 5 mW and conversion efficiencies reachingapproximately 15 %. Underlying this improved performance is our development ofpulley waveguides for broadband near-critical coupling, which exploits afundamental connection between the waveguide-resonator coupling rate andconversion efficiency. Finally, we find that mode competition reducesconversion efficiency at high pump powers, thereby constraining the maximumrealizable output power. Our work proves that optical parametric oscillatorsbuilt with integrated photonics can produce useful amounts of visible laserlight with high efficiency.

Efficient chip-based optical parametric oscillators from 590 nm to 1150 nm