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Ion beam plays a pivotal role in ion implantations and the fabrication ofnanostructures. However, there lacks a quantitative model to describe theresidual stresses associated with the ion-beam radiation. Radiation-inducedresidual stress/transformation strain have been mostly recognized in thehydrostatic sub strain space. Here, we use molecular dynamics (MD) simulationsto show that the response of a material to irradiation is generally anisotropicthat depends on the ion-beam direction, and should be described using tensorialquantities. We demonstrate that accelerator-based ion beam irradiation,combined with the intrinsic lattice anisotropy and externally inducedanisotropy (such as anisotropic mechanical loadings), causes radiation-actuatedshear transformation strains in addition to hydrostatic expansion. We map outthese complex correlations for several materials. Radiation-induced defects areshown to be responsible for residual shear stresses in the manner of Eshelbyinclusion transformation. We propose such tensorial response model should beconsidered for accurate nanoscale fabrication using ion-beam irradiation.

Ion-Beam Radiation-Induced Eshelby Transformations: The Mean and Variance in Hydrostatic and Shear Residual Stresses